Parameter | Spec. | Remark |
---|---|---|
Scannig Area | 12° x 12° | Garvano Mirror |
Mag. | 1 : 3 | xy Ratio |
NA | 0.08 | Object NA |
EFL | 86mm | - |
Distortion | 0.002% | - |
Wavelength | 1064 ㎚ | Laser |
FWD | 60 ㎜ | Object~1st surface |
TTL | 200 ㎜ | 1st surface~Last surface |
Size | Φ 90 ㎜ | - |