Features of three-dimensional measuring equipment

This adopts the optical non-contact measuring method, does not damage samples subject to measurement, and has measurement scores of times as precise as the existing equipment due to application of Nano-level autofocusing, yawing caused when moving the stage, and pithing calibration technology.

• Measuring range
  - Eccentricity measurement on both sides
  - Eccentricity adjustment
  - High Resolution AutoCollimator: 2.6 seconds for each resolution
  - High precision bearings: Radial Runout 0.5um